Fabrication and characterization of zinc oxide (ZnO) thin films based humidity sensor with fast response by sol-gel method
Present work deals with deposition of Zinc oxide (ZnO) thin films by sol-gel method. Sol was prepared using zinc acetate, 2-Methoxyethanol and monoethanolamine (MEA) as starting materials. Films were grown using spin coating method and annealed at 500◦C. ZnO films morphology was investigated by Scanning Electron Microscope. SEM images reveal that films are composed with wrinkles network. Crystalline structure was studied by means of X-ray diffraction analysis. XRD patterns exhibit three strong peaks (101), (002) and (100) planes assigned to Wurtzite structure. The obtained results for electrical properties were reported. Relative humidity sensing properties has been studied and determined by variation of electrical resistance measurements at various humidity levels. Our experimental results show that the temperature and morphology have strong influence on the response and recovery times of sensing.
Mots-clés
- Humidity sensing
- Response and recovery time
- SEM
- Sol-Gel
-
Thin films
-
- Substrate effect temperature on Cu2ZnSnS4 thin films deposited by
- Realization and study of ZnO thin films intended for optoelectronic
- Irradiance and temperature impact on thin film materials I-V curves
- Structural, Optical and Electrical Properties of ZnO:Fe Thin Films Grown by Spray Pyrolysis
- Study of structural and mechanical properties of tungsten carbides coatings
- XRD
- ZnO
fr
Science et Technologie
Journal of New technology and Materials
Volume 04
Numéro 02
?
